1785-BCM Backup Communication Module

1785-BCM Backup Communication Module

1785-BCM high-temperature diffusion/oxidation system is mainly composed of diffusion furnace, purification workbench, push-pull boat system and gas source cabinet. Diffusion/oxidation process in the production of semiconductor devices

1785-BCM will diffusion furnace temperature according to a certain temperature process to a specific temperature, and to ensure that the furnace is at a constant temperature; 2) the operator will be placed on the tray of the push-pull boat wafers to be diffused by the push-pull device into the diffusion furnace; 3) in the diffusion furnace to maintain a specific temperature conditions, the diffusion furnace to inject a variety of gases to be mixed.

1785-BCM the whole process to ensure that the participation of the furnace body to form a specific constant temperature zone, in order to make the wafer diffusion uniform. So the temperature control is the most important part of the diffusion process control system, the control effect directly determines the quality of semiconductor diffusion.